Capacitive Sensors
... The top silicon substrate has been etched to form ... The sensors have been fabricated
using double polished (100) silicon wafers ... with a resistivity of 0.1 ohm-cm. ...
www.usitt.ecs.soton.ac.uk/capacitive.shtml - 14k - Cached - Similar pages

Alvin Barlian's Webpage
... Heat transfer losses to the substrate reduce sensitivity of ... Fabrication starts with
4" n-type double-polished SOI wafers. ... resistivity of the SOIs was >5 ohm.cm ...
www.stanford.edu/~barlian/research.html - 13k - Cached - Similar pages

[PDF] Mass flow and tangential momentum accommodation in silicon ...
File Format: PDF/Adobe Acrobat - View as HTML
... polished crystal face of the silicon substrate and such ... Making an analogy to Ohm’s
law where the ... oxide layer was grown on a double-polished silicon wafer. ...
microfluidics.engin.brown.edu/ Breuer_Papers/Journals/JFM_TMAC.pdf - Similar pages

[PDF] Infrared spectra and second-harmonic generation in barium ...
File Format: PDF/Adobe Acrobat - View as HTML
... equipped with KRS5 windows. The substrates double-polished Si wa-
fers and Au mirrors were used as references. The experi- mental ...
www.esc.cam.ac.uk/astaff/redfern/ pdf%20offprints/JAP_Scott_etal.pdf


--------------------------------------------------
Note added at 2004-07-31 18:19:54 (GMT)
--------------------------------------------------

Si is silicone